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Micro-opto-electromechanical systems (MOEMS) are a special class of Micro-electro-mechanical systems (MEMS) which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical and electrical systems. MOEMS includes a wide variety of devices including optical switch, optical cross-connect, tunable VCSEL, microbolometers amongst others. These devices are usually fabricated using standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.
References for Micro-mechanical systems
- MMS
- MEMS
- Micro-electro-mechanical systems
- Micro-mechanical systems
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