M. J. Shaw has written:

'Excimer lasers' -- subject(s): Excimer lasers

excimer laser system

An Excimer Laser is an ultraviolet laser most often used in eye surgery, micro manufacturing and in the creation of computer chips, components, or integrated circuits.

Semiconductor laser

An exciplex is an excited state whose wavefunction overlaps a neighboring, dissimilar molecule. In contrast to an exciplex, an excimer is an emissive excited state whose wavefunction overlaps two adjacent molecules of like composition.