(electronics) A directed chemical etching process used in integrated circuit fabrication in which chemically active ions are accelerated along electric field lines to meet a substrate perpendicular to its surface.
reactive ion etching
| Sci-Tech Dictionary: reactive ion etching |
(rē′ak·tiv ′ī′än ′ech·iŋ)
| 5min Related Video: reactive ion etching |
Learn More
 | Sputtering |
| RIE |
| Plasma processing |
Help us answer these
 | What is the most chemically reactive ion? |
| Are sodium and fluoride ions reactive Why? |
| What does the reactivity series tell about an ion? |
Post a question - any question - to the WikiAnswers community:
Copyrights:
 |
 | Sci-Tech Dictionary. McGraw-Hill Dictionary of Scientific and Technical Terms. Copyright © 2003, 1994, 1989, 1984, 1978, 1976, 1974 by McGraw-Hill Companies, Inc. All rights reserved. Read more |
