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What is dry oxidation?

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βˆ™ 2008-04-24 23:54:40

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Dry oxidation is a process in which silicon dioxide is grown from silicon in a furnace in the prescence of oxygen. In contrast, wet oxidation is performed with steam.

2008-04-24 23:54:40
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What a difference between dry and wet oxidation?

Dry oxidation has a lower growth rate than wet oxidation although the oxide film quality is better than the wet oxide film. Therefore thin oxides such as screen oxide, pad oxide, and especially gate oxide normally use the dry oxidation process. Dry oxidation also results in a higher density oxide than that achieved by wet oxide and so it has a higher breakdown voltageIn case of wet oxidation where water is use instead of oxygen, the water molecule can dissociate at high temperatures to form hydroxide OH that can diffuse in the silicon faster than molecular O2. Therefore the wet oxidation process has a significantly higher oxidation rate than the dry oxidation. It is used to grow thick oxides such as masking oxide, blanket field oxide, and the LOCOS oxide.


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Oxidation occurs at the anode ("an ox") and reduction occurs at the cathode ("red cat").See the Web Link to the left for the specific reaction in a dry cell.


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What is the effect of dry corrosion?

Dry corrosion refers to the oxidation that occurs when oxygen in the air reacts with metal without the presence of a liquid. Its effects are not as detrimental as wet corrosion but it still causes some damage to the metal.


The oxidation state of CoCO3?

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Ca = +2 oxidation state O = -2 oxidation state H = +1 oxidation state


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Terminal oxidation is oxidation on the end of a molecule. An example would be oxidation of a terminal carbon atom in a carbon chain.


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