Asked in ScienceMath and ArithmeticGeometry
What is a planar surface?
February 18, 2011 5:14PM
In mathematics, a plane is any flat, two-dimensional surface.
A planar surface means that the surface of a material is straight in two dimensions, an example would be a perfectly flat smooth piece of glass. If an etch or chip is on the glass surface, or if the glass is heated and curves, then it is no longer a planar surface.
Semiconductor fabrication requires the wafer to be a planar surface.