Asked in Solid State PhysicsPhysics
What is dislocation density?
January 18, 2011 5:40AM
Dislocation density is the areal density of dislocations intersecting a plain, usually the free surface, given as number per cm2.
It may also be the volume density of dislocation line segments, given as the total length of dislocations divided by the containing volume (also 1/cm2), but this is rarely used in semiconductor physics, and more frequently found in engineering.
Dislocation density is typically measured by etching the free surface to form pits around the location at which the dislocation breeches the surface, and is termed etch pit density, or EPD.