Capacitance in mosfet is of three types:
gate capacitance
diffusion capacitance
routing capacitance
Gate capacitance: limits the speed of the device t which it can
be operated
Diffusion capacitance: It is the capacitance due to charge
carriers between drain and source.
Routing capacitance: It is the capacitance of the metal which is
deposited on the top of oxide layer.