Plasma processing

(engineering) Methods and technologies that utilize a plasma to treat and manufacture materials, generally through etching, deposition, or chemical alteration at a surface inside or at the boundary of the plasma.

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Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.

Plasma processing techniques include:

• Plasma activation
• Plasma modification
• Plasma functionalization
• Plasma polymerization
• Plasma Surface Interactions
• Plasma electrolytic oxidation

Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma ion doping, vacuum plasmaspraying, and reactive ion etching.

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