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How are piezoelectric materials that contain silicon used in science and industry?
Wiki User
∙ 10y ago
Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Some recent and emerging applications of piezoelectric MEMS are acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors. - See more at: http://www.chacha.com/question/how-are-piezoelectric-materials-that-contain-silicon-used-in-science-and-industry#sthash.EpLIkFTw.dpuf
Wiki User
∙ 10y ago
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