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Spectral reflectance measure a thin film's characteristics by reflecting light off the film and analyzing the resulting reflectance spectrum over a range of wavelengths. Light reflected from different interfaces of the film can be in- or out-of-phase so these reflections add or subtract, depending upon the wavelength of the light and the film's thickness and index. The result is intensity oscillations in the reflectance spectrum that are characteristic of the film.

To determine the film's thickness, the software calculates a theoretical reflectance spectrum that matches as closely as possible to the measured spectrum. It begins with an initial guess for what the reflectance spectrum should look like, based on the nominal film stack. This includes information on the thickness and the refractive index of the different layers and the substrate that make up the sample. The theoretical reflectance spectrum is then adjusted by adjusting the film's properties until a best fit to the measured spectrum is found.

This metrology can be used on thin film thickness measurement, even for transparent films.

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14y ago
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12y ago

a specified material over several wavelengths will reflect from electromagnetic radiation.

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Q: Why Nature of spectral reflectance curves?
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