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SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) is communication interface protocols for communication between semiconductor equipment and a fab host.
SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) is communication interface protocols for communication between semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitors equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I).
The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products, and change variables. With SECS/GEM, all this can be performed in a standard way. SECS/GEM protocol has been standardized by the non-profit association SEMI (Semiconductor Equipment and Materials International). semi.org to learn more about SEMI standards and SECS/GEM protocol.
