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What is the smallest machine in the world?
Smallest machines are MEMS (microelectromechanical systems). They are used inside silicon chips for all sorts of things such as gyroscopes and accelerometers
Who made Smartdust?
The Smartdust, a hypothetical wireless network of tiny microelectromechanical sensors (MEMS), concept was introduced by Kristofer S. J. Pister in 2001.
What has the author Behraad Bahreyni written?
Behraad Bahreyni has written: 'Fabrication and design of resonant microdevices' -- subject(s): Microelectromechanical systems, Microfabrication, Design and construction, Resonance
What type of technology is MEMS?
MEMS stands for microelectromechanical systems, and refers to extremely small devices. These devices are usually used in computer printers, car accelerometers, and gyroscopes.
What has the author Michael R Douglass written?
Michael R. Douglass has written: 'Emerging digital micromirror device based systems and applications II' -- subject(s): Microelectromechanical systems, Congresses, Mirrors, Light modulators, Scientific applications, Optoelectronic devices 'Emerging digital micromirror device based systems and applications II' -- subject(s): Microelectromechanical systems, Congresses, Mirrors, Light modulators, Scientific applications, Optoelectronic devices
What has the author Jason J Gorman written?
Jason J. Gorman has written: 'Feedback control of MEMS to atoms' -- subject(s): Feedback control systems, Microelectromechanical systems, Microelectronics
What has the author Tommi Suni written?
Tommi Suni has written: 'Direct wafer bonding for MEMS and microelectronics' -- subject(s): Sealing (Technology), Microelectromechanical systems, Silicon-on-insulator technology
What has the author Volker Kempe written?
Volker Kempe has written: 'Inertial MEMS' -- subject(s): Microelectromechanical systems, Inertial navigation systems, BioMEMS 'Analyse stochastischer Systeme' -- subject(s): Stochastic systems
What has the author Jean Berthier written?
Jean Berthier has written: 'Microdrops and Digital Microfluidics' -- subject(s): Microelectromechanical systems, Methods, Microchemistry, Microfluidics, Spraying equipment, Equipment and supplies, Methodology, Atomizers, Drops, Electrostatic atomization, Microdroplets
What has the author Lixin Dong written?
Lixin Dong has written: 'Optomechatronic micro/nano devices and components III' -- subject(s): Microelectromechanical systems, Photonics, Congresses, Design and construction, Nanostructured materials, Mechatronics, Optical storage devices, Optoelectronic devices
What has the author Martin Kulawski written?
Martin Kulawski has written: 'Advanced CMP processes for special substrates and for device manufacturing in MEMS applications' -- subject(s): Sealing (Technology), Microelectromechanical systems, Chemical mechanical planarization, Silicon-on-insulator technology, Thick films
What has the author Joel A Kubby written?
Joel A. Kubby has written: 'A guide to hands-on MEMS design and prototyping' -- subject(s): Microelectromechanical systems, TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics 'Silicon photonics V' -- subject(s): Silicon, Optical properties, Optoelectronic devices, Photonics, Congresses 'Silicon photonics III' -- subject(s): Silicon, Optical properties, Optoelectronic devices, Photonics, Congresses
