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What is auto epitaxy?

Updated: 8/20/2019
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What has the author V A Shchukin written?

V. A. Shchukin has written: 'Epitaxy of nanostructures' -- subject(s): Nanostructures, Epitaxy


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What is meant epitaxy?

Epitaxy is the deposition technique allowing a thin mono crystalline layer to grow over a mono crystalline substrate of the same type. It is used for example in the fabrication of semiconductor lasers, where the alloy InGaAsP is growth over a substrate of InP to constitute the laser active region. Naturally in order to perform epitaxy the film crystallographic structure has to be very similar (ideally identical) to that of the substrate. For this reason often epitaxy is performed using very similar materials or event the same material with different types of dopants.


What is epitaxy in IC fabrication?

Its the ordered growth of a material on the same material such that there vl be no any type of mismatch in their interface.


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Martin Robert Greaves has written: 'Organotellurium compounds for metal organic vapour phase epitaxy'


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What has the author Nikolaus Dietz written?

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