Very Large Scale Integration (VLSI)

What is etching in very large scale integration?

Answer

Wiki User
01/03/2009

Very-large-scale integration (VLSI) is the process of creating integrated circuits by combining thousands of transistor-based circuits into a single chip. Etching is used to create ultra-fine circuit pathways in silicon wafers. While early techniques used a "wet" fluid to dissolve the unwanted material, newer techniques use "dry" plasma etching to remove wafer material.