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Very-large-scale integration (VLSI) is the process of creating integrated circuits by combining thousands of transistor-based circuits into a single chip. Etching is used to create ultra-fine circuit pathways in silicon wafers. While early techniques used a "wet" fluid to dissolve the unwanted material, newer techniques use "dry" plasma etching to remove wafer material.

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Q: What is etching in very large scale integration?
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