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What is meant epitaxy?

Updated: 8/20/2019
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11y ago

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Epitaxy is the deposition technique allowing a thin mono crystalline layer to grow over a mono crystalline substrate of the same type. It is used for example in the fabrication of semiconductor lasers, where the alloy InGaAsP is growth over a substrate of InP to constitute the laser active region.

Naturally in order to perform epitaxy the film crystallographic structure has to be very similar (ideally identical) to that of the substrate. For this reason often epitaxy is performed using very similar materials or event the same material with different types of dopants.

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