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Oxygen is an element, which is in the purest form it can be. Its most stable form, O2, could be considered a compound however, which could bring up the argument that oxygen is made up of the O2 compound.

Although the answer above is correct, you can go on to say that, the oxygen atom is made up of protons, neutrons and also electrons. Also going even smaller these are made up of many subatomic particles, which are widely believed to be made up of quarks.

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