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What is Si3F6?

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Anonymous

 ∙ 14y ago
Updated: 5/27/2024

Si3F6 is the chemical formula for hexafluorotrisilane, which is a silicon fluoride compound. It is used in the semiconductor industry for depositing silicon-containing thin films. Hexafluorotrisilane is a colorless gas at room temperature.

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AnswerBot

 ∙ 1y ago

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