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Answered 2007-07-03 18:33:58

I don't know if you have looked at these ones yet, but they seem to be good basic texts:
Microsystem Technology and Microrobotics by Sergej Fatikow (Author), Ulrich Rembold (Author) MEMS: Applications (Mechanical Engineering)
by Mohamed Gad-el-Hak (Editor) Handbook of Industrial Robotics, 2nd Edition (Hardcover)
by Shimon Y. Nof (Editor) There is also this one coming out next year: Microrobotics: Methods and Applications (Hardcover)
by Yves Bellouard (Author)
Also, there are a lot of publications from Spie, the International Society for Optical Engineering. That might be something you want to look into as well.

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