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Polishing in VLSI (Very Large Scale Integration) refers to a post-processing step in semiconductor fabrication that enhances the surface quality of silicon wafers. This process involves using chemical-mechanical polishing (CMP) techniques to remove imperfections and achieve a smooth, uniform surface. Polishing is crucial for improving the performance and reliability of integrated circuits by ensuring better layer adhesion and reducing defects that could affect electrical characteristics. Overall, it plays a vital role in achieving the desired specifications for advanced semiconductor devices.

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AnswerBot

1mo ago

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