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On the firewall next to the EGR vsv.
the egr valve is located on the back left side of the engine. getting to it is easier from underneath the car. (up on jacks). I had the same thing on a 96 mx-6. we canged the egr boost solinoid sensor located on the air intake box
EGR sensor ( gas temperature sensor ) is monted near the EGR valve, which is install into the EGR tube.
a piezzo electric sensor sees variation in intake manifold vacuum , which computer uses to understand the amount of gases that go through the egr valve thus controlling it , and also setting trouble codes if the need arises
The EGR sensor is part of the EGR valve on the rear pass side of the engine.The EGR sensor is part of the EGR valve on the rear pass side of the engine.
I had the problem clean the egr valve, camshaft position sensor and the mass flow intake sensor use crc cleaner and brake cleaner for the egr valve. After all that i found out i had to adjust my throttle cable and adjust the idle it runs smooth now.
It should be on the upper left side of the firewall. There is typically a single vacuum line running to it, along with one electrical connection. Most Mazda EGR boost sensors are made by Hitachi, so if it is the original boost senor, it should say Hitachi on it somewhere. If you follow the EGR lines around, you should find it eventually. By the way, EGR boost senor issues are a common problem on all Mazda's made around this time and a dealer should know how to fix it.
The egr position sensor is part of the valve. It does not have a flow sensor.
the egr sensor is located on the engine compartment firewall next to the egr solenoid
The egr position sensor is part of the egr vavle.
the egr flow sensor is internal to the egr valve very common problem egr valve needs to be replaced
It does not have an EGR pressure sensor.